[1P01-32] Poster session

[1P14] Differences in the effects of atomic hydrogen irradiation on hydrogenated and highly hydrogenated DLC films

*Yuichi Haruyama¹, Akira Heya², Koji Sumitomo², Seigo Ito² (1. LASTI, University of Hyogo (Japan), 2. Graduate School of Engineering, University of Hyogo (Japan))

The effect of atomic hydrogen irradiation on hydrogenated and highly hydrogenated diamond-like carbon (DLC) thin films with different hydrogen contents was investigated using the photoelectron spectroscopy and X-ray absorption spectroscopy. For the hydrogenated DLC films, the C 1s photoelectron peak shifted from 284.7 eV to 285.2 eV upon atomic hydrogen irradiation, accompanied by a reduction in peak width. This indicates a change in the surface state from being rich in sp²-bonded carbon to being rich in sp³-bonded carbon. In contrast, the highly hydrogenated DLC films showed almost no change in spectral shape, even with increased irradiation time. These results demonstrate that changes in the surface electronic structure of DLC thin films induced by atomic hydrogen irradiation depend strongly on the hydrogen content of the DLC film.

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