[2B01-06] Recent Trends in Vacuum Measurement Technology and National Standards of Pressure and Vacuum

9:05 AM - 9:35 AM JST(12:05 AM - 12:35 AM UTC)

[2B02] Ensuring metrological traceability for pressure and vacuum measurements - national standards, international equivalence, and traceability system

*Hiroaki Kajikawa¹ (1. National Institute of Advanced Industrial Science and Technology (Japan))

Metrological traceability is important to ensure the reliability of pressure and vacuum measurements, which support a wide range of industrial fields, such as semiconductor and electronic-device manufacturing, surface treatment processes, and analytical instruments. Three key elements, the national standards, their international equivalence, and traceability system, are explained in this presentation. The National Metrology Institute of Japan (NMIJ) maintains national pressure and vacuum standards in Japan, covering 18 orders of magnitude from 10^-9 Pa to 10⁹ Pa using several systems. International equivalence of the established standards is confirmed through international comparisons. The national standards are disseminated to industries through a traceability system based on ISO/IEC 17025. In addition, the current research and development activities in NMIJ and contributions to industry are introduced.

Password required to view