[2B01-06] Recent Trends in Vacuum Measurement Technology and National Standards of Pressure and Vacuum

10:50 AM - 11:20 AM JST(1:50 AM - 2:20 AM UTC)

[2B05] Development of a Wide-Range Pressure Calibration System with Traceable Measurement Uncertainty Evaluation

*Chien-Nan Hsiao¹, Chien-Bao Lin¹, Gui-Sheng Zeng¹, Wen-Hao Cho¹, Yu-Wei Lin¹ (1. National Center for Instrumentation Research, National Institutes of Applied Research (Taiwan))

The development of a wide-range pressure calibration system covering pressures from10 3 to 10 -6 Torr is reported to meet metrological requirements for accurate and traceable vacuum measurements. To ensure calibration accuracy, the system design optimizes key factors such as the uniformity of gas distribution and the geometric positioning of the gauges under calibration. The calibration procedures are performed following established comparison methods for vacuum gauges to guarantee traceability and reproducibility. Multiple gauge types, including capacitor vacuum gauges, spinning rotor gauges, and hot-cathode ionization gauges, are integrated into the system, allowing for a comprehensive evaluation and quantification of measurement uncertainties. The resulting data provide a robust assessment of system performance, supporting traceable vacuum measurements and contributing to the development and maintenance of national and international pressure standards.

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