[2D01-04] Thin Film (TF)

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[2D04] Quantitative evaluation of longitudinal ionic conductivity in La_0.95Ba_0.05F_2.95 epitaxial thin films using comb-type electrodes patterned on CaF₂(111) substrates

*Lustikova Jana¹, Ryota Shimizu¹ (1. Institute for Molecular Science (Japan))

La_0.95Ba_0.05F_2.95 epitaxial thin films were fabricated on CaF₂(111) substrates with 30 μm-spaced comb-type electrodes, and their longitudinal fluoride-ion conductivity was quantitatively evaluated by AC impedance spectroscopy. The films were deposited by rf-magnetron sputtering from a LaF₃-BaF₂ target. Adding 5% CF₄ to Ar suppressed La₂O₃ formation and enabled single-phase tysonite epitaxial growth. Temperature-dependent Nyquist plots showed semicircular impedance responses attributed to fluoride-ion conduction, giving a conductivity of approximately 5e-7 S/cm at 30^oC. These results demonstrate that comb-type electrodes provide a practical platform for direct in-plane impedance characterization of epitaxial BaF₂-doped LaF₃ thin films and for clarifying the effects of crystallinity, stoichiometry, and interfaces on thin-film fluoride-ion transport.

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