[2E01-08] Vaccuum Science and Technology (VST)

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[2E05] Partly Pd-covered NEG coatings

*XIUGUANG JIN¹, Takashi Uchiyama¹ (1. KEK (Japan))

Partly Pd/Zr films were fabricated on Cu ducts using magnetron sputtering and the pumping performance of the coated specimens was investigated. The onset of film activation was observed at 80 °C and the samples were found to pump gaseous H₂, CO and CO₂. This activation temperature of 80 °C was much lower than the value of 180 °C associated with TiZrV coatings. In addition, the pumping rates of the partly Pd/Zr films did not decrease after multiple exposures to ambient air and heating.

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