[2E01-08] Vaccuum Science and Technology (VST)

11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)

[2E06] Simulation of the pumping speed of Ti-Zr-V-Type Non-Evaporative Getter (NEG) Coated Sheets

*Takashi Shiga¹, Junichiro Kamiya², Katsuya Kuramochi³ (1. TOKYO ELECTRONICS CO., LTD (Japan), 2. Japan Atomic Energy Agency (Japan), 3. Sun-Nanotechnology Co.,Ltd., (Japan))

To compare the pumping speed measured using an actual instrument with the simulation results, it is necessary to take into account factors such as the impact of exhaust gases and the degree of NEG sheet activation; however, if simulation becomes possible, it will demonstrate the practicality of the NEG sheet.

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