[2P01-29] Poster session

[2P14] Deposition of Oxygen-Free Pd/Ti NEG Films on Electrochemically Buffed Ferromagnetic Substrates and Evaluation of Pumping Performance

*Yu Kano¹, Manabu Yabe¹, Kenichi Hamanaka¹, Takashi Kikuchi², Kazuhiko Mase^2,3 (1. IKC (Japan), 2. KEK (Japan), 3. SOKENDAI (Japan))

Ultra-high vacuum systems such as accelerators require vacuum pumps that maintain high performance below 10^-8 Pa while being oil-free, low-noise, vibration-free, energy-efficient, and cost-effective. Oxygen-free Pd/Ti non-evaporable getter (NEG) films, enable efficient pumping of H2 and CO after baking. Tandem operation with ion pumps can further achieve pressures below 10^-10 Pa; however, magnetic field leakage from ion pumps necessitates shielding. Permalloy, a high-permeability Ni-Fe alloy, offers effective magnetic shielding and potential integration of vacuum and shielding functions. Although Pd/Ti NEG films have been studied on non-magnetic substrates, their application to ferromagnetic permalloy remains unexplored. In this study, electrochemical buffing (ECB) was employed as a pretreatment to address surface and magnetic challenges. Pd/Ti films were deposited on ECB-treated stainless steel and permalloy flanges, and their pumping performance was evaluated to assess feasibility.

Password required to view