Presentation Information
[2P15]Development of contamination-free transport of hydrogen-terminated Si(100) using high-performance sample transfer vessel and its surface characterization
*Eiichi Kobayashi1,2, Reona Kitaura3, Takafumi Ishibe3, Shukichi Tanaka2, Yoshiaki Nakamura3 (1. Kyushu Synchrotron Light Research Center (Japan), 2. National Institute of Information and Communications Technology (Japan), 3. Graduate School of Engineering Science, Osaka University (Japan))
We improved a previously developed transport container to enable easy transport under a nitrogen atmosphere. We successfully transported hydrogen-terminated Si substrates over a long distance (~ 600 km) and for an extended period (~ 49.5 hours) without contamination.
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