[2P01-29] Poster session

[2P17] Development of SUS UHV Transfer Case for Sample Transport Using Titanium NEG Sheets

*Yuko Morohashi¹, Junichiro Kamiya¹, Kenichi Takeishi² (1. Japan Atomic Energy Agency (Japan), 2. ULVAC TECHNO, Ltd. (Japan))

We developed an ultra-high-vacuum (UHV) sample-transfer case using a titanium sheet coated with a non-evaporable getter (NEG) installed inside a conventional stainless-steel chamber. Conventional transfer cases typically require a NEG pump, an ion pump, batteries, and a power supply, which increase the size, weight, and complexity of the system. In the present system, activating the internal NEG-coated titanium sheet (the “NEG sheet”) provides continuous getter pumping without any external power supply. Using a turbomolecular pump, the chamber pressure reached 4.6 × 10⁻⁸ Pa; after isolating the case from the pump, a pressure of approximately 2.0 × 10⁻⁷ Pa was maintained for five days. These results demonstrate the feasibility of pump-free UHV transport based on a conventional stainless-steel chamber. The effects of repeated NEG activation and the residual-gas composition will also be presented.

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