Presentation Information
[3E03]Current status of research using synchrotron radiation photoemission electron microscopy: From advanced devices to industrial applications
*Takuo Ohkochi1,2,3 (1. University of Hyogo (Japan), 2. RIKEN SPring-8 Center (Japan), 3. Japan Synchrotron Radiation Research Institute (Japan))
Synchrotron-radiation Photoemission Electron Microscopy (PEEM) provides information equivalent to XAS, XMCD, and XPS, and so on, with nanoscale resolution. Initially utilized for fundamental surface science, it now serves as a versatile platform across fields from electronic/magnetic devices to planetary science, industrial applications, and life sciences. As a full-field microscope, PEEM offers high data throughput and stably achieves a spatial resolution of 10–100 nm during practical real-sample measurements. It thus delivers an excellent balance between resolution and data productivity. While the PEEM at SPring-8 mainly covers inorganic materials (200–2000 eV), the PEEM at BL09 of NewSUBARU focuses on light elements like C, N, and O (50–750 eV), advancing analyses of soft materials including semiconductor resists and hydrogen strategy materials. Anticipating the SPring-8 dark time from FY2027, we also attempt at generating circularly polarized light for Fe L-edge magnetic analysis at NewSUBARU.
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