[C-6] MEMS and Advanced Metallization II

11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)

[C-6-02] Pilot-Line Ready Fabrication Process of High Aspect Ratio Nanoneedles for Biomedical Applications

〇Moeen Ghafoor Piracha¹, Jun Wang¹, Alnazer Mohamed¹, Antonio Palombizio¹, Bivragh Majeed¹, Abhilash Paneri¹ (1. Imec (Belgium))

DOI:

https://doi.org/10.7567/SSDM.2024.C-6-02

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