[E-3] Si Photonics

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[E-3-03] Record-low C-band TM mode propagation loss of 0.28 dB/cm in silicon single-mode waveguides with smooth top surface

〇TSUYOSHI HORIKAWA¹, Makoto Okano², Nobuhiko Nishiyama^1,3 (1. Tokyo Inst. of Tech. (Japan), 2. National Inst. of Advanced Indus. Sci. and Tech. (Japan), 3. Photonics Electronics Tech. Res. Association (Japan))

DOI:

https://doi.org/10.7567/SSDM.2024.E-3-03

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