Presentation Information
[G-4-01]"Advancing the pH Sensitivity in Ferroelectric-ISFETs Beyond the Nernst Limit via Sol-Gel Process PZT Thin Film Integration and Coplanar Gate Sensing Paradigm"
〇Dong-Gyun Mah1, Seong-Moo Oh2, Jin-Wook Shin3, Jong-Heon Yang3, Jongwan Jung2, Won-Ju Cho1 (1. The Univ. of Kwangwoon (Korea), 2. The Univ. of Sejong (Korea), 3. The Lab. of ETRI (Korea))