Presentation Information
[M-6-04]Comprehensive Study on Crystal Growth of CaSi2 Layers on Si(111) Using Solid Phase Epitaxy
〇Kagiri Kato1, Shigehisa Shibayama1, Mitsuo Sakashita1, Osamu Nakatsuka1,2, Masashi Kurosawa1 (1. Grad. Sch. of Eng., Nagoya Univ. (Japan), 2. Inst. of Materials and Systems for Sustainability, Nagoya Univ. (Japan))