Presentation Information
[PS-02-01]Ozone SiO2/HfO2 Interface Engineering for Performance and Reliability Optimization of Hf0.5Zr0.5O2 FeFETs: Device Integration and Electrical Investigation
〇Xueyang Li1, Yaxuan Yuan1, Chengji Jin2, Xinze Li1, Xiao Yu2, Ran Cheng1, Genquan Han3 (1. The Univ. of Zhejiang (China), 2. The Lab. of Zhejiang (China), 3. The Univ. of Xidian (China))