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Analysis of reliability improvement in HfO<sub>2</sub>-based ferroelectric capacitorsby ozone oxidation of the bottom electrode

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

02: Advanced and Emerging Memories / New Applications

2024 International Conference on Solid State Devices and Materials

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[PS-02-02]Analysis of reliability improvement in HfO₂-based ferroelectric capacitorsby ozone oxidation of the bottom electrode

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[PS-02-02]Analysis of reliability improvement in HfO2-based ferroelectric capacitorsby ozone oxidation of the bottom electrode

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[PS-02-02]Analysis of reliability improvement in HfO₂-based ferroelectric capacitorsby ozone oxidation of the bottom electrode