[PS-02] 02: Advanced and Emerging Memories / New Applications

[PS-02-12] Analysis of Cell Characteristics depending on Vertical Channel Profile and Multiple Dielectric WL Spacer in 3D NAND Flash Memory

Daewoong Kang¹, 〇Gwansun Choi^1,2, Minkyo Suh^1,2, Chaeyeon Jung^1,3, Youngho Jung⁴ (1. Seoul National University (Korea), 2. Chung-Ang University (Korea), 3. Soongsil Univ. (Korea), 4. Daegu University (Korea))

DOI:

https://doi.org/10.7567/SSDM.2024.PS-02-12

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