Presentation Information
[PS-02-21]Improving the TER by Incorporating Antiferroelectric HZO Layer in 5 nm Thin MFM FTJ
〇Geon Park1, ManhCuong Nguyen1, AnHoang Nguyen1, AnhDuy Nguyen1, Hyunsoo Kim1, Kyungsoo Hwang1, Jaekyeong Kim1, Hoyeon Shin1, Siun Song1, Rino Choi1 (1. Inha Univ. (Korea))