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Effect of Al2O3 deposition temperature on the electrical properties of Al2O3/β-Ga2O3 (001) metal oxide semiconductor capacitors

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04: Power / High‐speed Devices and Materials

2024 International Conference on Solid State Devices and Materials

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[PS-04-14]Effect of Al₂O₃ deposition temperature on the electrical properties of Al₂O₃/β-Ga₂O₃ (001) metal oxide semiconductor capacitors

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Presentation Information

[PS-04-14]Effect of Al2O3 deposition temperature on the electrical properties of Al2O3/β-Ga2O3 (001) metal oxide semiconductor capacitors

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[PS-04-14]Effect of Al₂O₃ deposition temperature on the electrical properties of Al₂O₃/β-Ga₂O₃ (001) metal oxide semiconductor capacitors