[PS-06] 06: Energy Harvesting and Converting Devices and Materials

[PS-06-02] Thermal Stability and Energy Storage Performances of MIM Capacitors Based on Antiferroelectric 10 nm- Hf_xZr_1-xO₂

〇Rabei Barhoumi^1,2, Nicolas Vaxelaire¹, Zineb Saghi¹, Patrice gonon², Vincent Jousseaume¹, Messaoud Bedjaoui¹ (1. Univ. Grenoble Alpes, CEA, Leti, F-38000 Grenoble, France (France), 2. Univ. Grenoble Alpes, CNRS, LTM, Grenoble 38000, France (France))

DOI:

https://doi.org/10.7567/SSDM.2024.PS-06-02

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