Presentation Information
[PS-10-04]Effects of Plasma Hydrogenation on the Performance of T-shaped Gate Poly-Si Thin-Film Transistors
〇Geng-Yuan Xie1, Cheng-Kuei Lee1, Pei-Wen Li1, Ke-Yin Jhou2, Kun-Ming Chen2, Guo-Wei Huang2, Horng-Chih Lin1 (1. National Yang Ming Chiao Tung University (Taiwan), 2. Taiwon Semiconductor Research Institute (Taiwan))