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Hot-Wire-Type Micromachined Chemiresistive Gas Sensors for Battery-Powered City Gas Alarms

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10: Thin Film Electronics: Oxide / Non‐single Crystalline / Novel Process

2024 International Conference on Solid State Devices and Materials

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[PS-10-08]Hot-Wire-Type Micromachined Chemiresistive Gas Sensors for Battery-Powered City Gas Alarms

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