Presentation Information
[PS-10-10]Investigation of Indium-optimized IGZO TFT via Plasma Enhanced Atomic Layer Deposition Suitable for CMOS Backend of Line Integration
Meishan Zhang1, 〇Wenhui Wang1, Jiqing Lu1, Jun Lan1, Haoran Peng1, Jiamin Li1, Feichi Zhou1, Longyang Lin1, Mei Shen1, Yida Li1 (1. Southern University of Science and Technology (China))