Presentation Information
[PS-10-13]Extremely Downscaling Ultra-thin ALD-ZnO Transistors to Sub-20nm
〇Minghe Zhang1, Tingzhen Yi1, Dengqin Xu1, Ruibin Duan1, Junchen Dong2, Yi Wang1, Dedong Han1,3,4, Xing Zhang1,5 (1. Peking Univ. (China), 2. Beijing Info. Sci. and Tech. Univ. (China), 3. Beijing Advanced Innovation Center for Integrated Circuits (China), 4. Beijing Superstring Academy of Memory Tech. (China), 5. Peking Univ. Shenzhen Graduate School (China))