[SO-PS-01] 01: Advanced CMOS: Material Science / Process Engineering / Device Technology

1:54 PM - 1:56 PM JST(4:54 AM - 4:56 AM UTC)

[SO-PS-01-13] Texture of Orthorhombic ScSi in Annealed TiN / Sc / Si(:P)(001) Contact Stacks

〇Bert Pollefliet¹, Clement Porret², Christophe Detavernier³, Jean-Luc Everaert², Kiroubanand Sankaran², Erik Rosseel², Roger Loo², André Vantomme¹, Clement Merckling¹ (1. KU Leuven (Belgium), 2. imec (Belgium), 3. Ghent University (Belgium))

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