[SO-PS-01] 01: Advanced CMOS: Material Science / Process Engineering / Device Technology

2:00 PM - 2:02 PM JST(5:00 AM - 5:02 AM UTC)

[SO-PS-01-16] Atomic-Scale Insights into the Effects of Biaxial Strain on the Electronic Structure of Orthorhombic Hf_0.5Zr_0.5O₂

〇Yu Hong Chen¹、Chen You Wei²、Yi Ju Yao²、Fu Ju Hou³、Guang Li Luo³、Yung Chun Wu^1,2  (1. Department of Engineering and System Science, National Tsing Hua University (Taiwan)、2. College of Semiconductor Research, National Tsing Hua University (Taiwan)、3. Taiwan Semiconductor Research Institute (Taiwan))

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