Presentation Information

[SO-PS-06-02]Thermal Stability and Energy Storage Performances of MIM Capacitors Based on Antiferroelectric 10 nm- HfxZr1-xO2

〇Rabei Barhoumi1,2, Nicolas Vaxelaire1, Zineb Saghi1, Patrice gonon2, Vincent Jousseaume1, Messaoud Bedjaoui1 (1. Univ. Grenoble Alpes, CEA, Leti, F-38000 Grenoble, France (France), 2. Univ. Grenoble Alpes, CNRS, LTM, Grenoble 38000, France (France))

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