Presentation Information

[STS]Role of academia in the 2-nm-node era and beyond
- There are still many things to research at academia ! or ? -

〇Rihito Kuroda1,2, 〇Kazuya Masu3, 〇Seiichi Miyazaki4, 〇Akira Toriumi5, 〇Tomonari Yamamoto6, (1. Tohoku Univ., 2. Rapidus Corp., 3. Tokyo Tech, 4. Hiroshima Univ., 5. The Univ. of Tokyo, 6. Tokyo Electron Ltd.)