[C-1] Power and Sensing Circuits

2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)

[C-1-03] Statistical Capacitance Measurement of Si Trench Capacitors Using Array Test Circuit

〇Ryoya Nishimaki¹, Koga Saito¹, Takezo Mawaki^1,2, Ken Miyauchi², Rihito Kuroda^1,2 (1. Graduate School of Engineering, Tohoku University (Japan), 2. New Industry Creation Hatchery Center, Tohoku University (Japan))