[E-5] Qubit Technology

9:00 AM - 9:30 AM JST(12:00 AM - 12:30 AM UTC)

[E-5-01 (Invited)] 300mm All Silicon Gate-Stack for Si/SiGe Spin Qubit

〇Clément Godfrin¹, Arne Loenders^1,2, Yosuke Shimura¹, Roger Loo^1,3, Bart Raes¹, Gulzat Juliel¹, Sugandha Sharma¹, Stefan Kubicek¹, Sofie Beyne¹, Massimo Mongillo¹, Danny Wan¹, Kristiaan De Greve^1,4 (1. IMEC (Belgium), 2. Department of Electrical Engineering, KULeuven (Belgium), 3. Ghent Univ., Dep. of Solid-State Sci. (Belgium), 4. Proximus chair in quan. scie. and tech., dep. of electrical engineering, KULeuven (Belgium))