Presentation Information

[G-1-03]Low Divergence Si/SiN Millimeter-long antennas for Silicon Photonics based Optical-Phased Arrays

〇Louise-Eugénie Bataille1, Sylvain Guerber2, Beatrice Dagens3, Frederic Boeuf1 (1. STMicroelectronics (France), 2. CEA Leti (France), 3. Univ. Paris-Saclay, CNRS, Centre de Nanosciences et de Nanotechnologies (France))