[G-1] Integrated Photonics

2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)

[G-1-04] Low Propagation Loss in LPCVD Si₃N₄ Waveguides Without the Need for High-Temperature Annealing: Expanding Applications in Silicon Photonics

〇Norikatsu Takaura^1,2, Shoma Miyata¹, Moataz Eissa², Takaaki Noda¹, Yuji Urano¹, Zhao Jiaang^1,2, Hiroaki Takahashi^1,2, Shuntaro Machida¹, Tsuyoshi Horikawa², Nobuhiko Nishiyama² (1. KOKUSAI ELECTRIC CORPORATION (Japan), 2. Institute of Science Tokyo (Japan))