Presentation Information

[PS-02-22]Cycling voltage dependence of the oxygen vacancy concentration profile in 6 nm HfxZr1-xO2 based ferroelectric capacitors

〇Nick Barrett1, Gunjan Yadav1, Lucia Perez Ramirez1, Ibrahima Gueye2, Seo Okkyun2, Jean Coignus3, Nicolas Vaxelaire3, Laurent Grenouillet3 (1. CEA Saclay (France), 2. SPring-8 (Japan), 3. CEA-Leti (France))