Presentation Information
[PS-02-23]Al2O3 Intercalation and Phase-Asymmetric Engineering for Thermal-Budget-Friendly HfxZr1-xO2 Planar and 3D DRAM Capacitors
〇Congcong Xu1, Hongwei Hao1,2, Zhuo Chen1,3, Jian Rong1, Dan Lv1, Lianqi Zhao1, Yongchang Li1, Lu Wang1, Dongdong Li1 (1. Zhangjiang Laboratory (China), 2. Shanghai Jiao Tong University (China), 3. Fudan University (China))