Presentation Information
[PS-02-28]Fringe-Field-Controlled Optimized Spatial Distribution of Trap Charge to Overcome Z-Pitch Scaling Limits in 3D NAND Flash
〇seungmin lee1, Yong Kyu Lee2, Yong Sang Kim3 (1. Sungkyunkwan Univ. Samsung electronics (Korea), 2. Samsung electronics (Korea), 3. Sungkyunkwan Univ. (Korea))