Presentation Information
[PS-10-12]Characterization of NbTiN/HZO/NbTiN MIM Capacitors for high frequency AC Clock & Power Distribution Network for Superconducting Digital Circuits
〇Seifallah Ibrahim1, Blake Hodges1, Steven Brebels2, Julian Gil Pinzon1, Trent Josephsen1, Ankit Pokhrel2, Daniel Perez Lozano2, Yann Canvel2, Bart Kenens2, Amey Walke2, Gianpiero Maccarrone Lapi1, Sara Iraci2, Mihaela Popovici2, Benjamin Huet2, Quentin Herr1,2, Zsolt Tokei2, Anna Herr1,2 (1. IMEC USA Nanoelectronics Design Center, Inc (United States of America), 2. IMEC (Belgium))