Presentation Information
[PS-10-16]Influence of Zr(NMe2)4 Admixute in CpZr(NMe2)3 on ZrO2 Thin Film Properties
〇Sangmin Lee1, Hyunki Kim2, Kwanhyun Park2, Hye-Lee Kim1, Won-Jun Lee1, Kyungsik Lee2, Jungwoo Park2, Jongwan Jung1, Seongmoo Oh1 (1. The Univ. of Sejong (Korea), 2. Hansol Chemical (Korea))