Presentation Information

[PS-10-19]BEOL-Compatible Self-Aligned Dual-Gate ALD InZnO TFT

〇Mengran Liu1, JiYe Li1, Yuhan Zhang1, Zhendong Jiang1, Shengjie Yang1, Xinwei Wang1, Shengdong Zhang1, Lei Lu1 (1. Peking Univ. (China))