Presentation Information
[PS-11-09]Phase Evolution and Substrate-Dependent Passivation Behavior of ALD-Ru Films under Oxidizing Conditions
〇Youngseo Na1, Hyunjin Lim1, Seungchae Lee1, Yehbeen Im1, Donguk Kim1, Kangbaek Seo1, Changhwan Choi1 (1. Hanyang Univ. (Korea))