[PS-11] 11: Advanced Materials: Synthesis / Crystal Growth / Characterization

[PS-11-11] Segmentation of Structured Defect Patterns in Wafer Maps Using U-Net Trained on Programmatically Generated Rule-Based Synthetic Data

〇Hironori Banba^1,2, Ichiro Omura² (1. GlobalWafers Japan Co., Ltd. (Japan), 2. Kyushu Institute of Technology (Japan))