Presentation Information

[SO-PS-03-01]Microstructure of HiK laminates for MIM capacitors

〇Yuichi Watanabe1, Yasuhiro Oyama1, Naoaki Tanaka1, Zhouran Han2, Vince McGahay3, Karen Barker3, Jeff Gambino3 (1. onsemi (Japan), 2. University of Illinois Urbana-Champaign, (United States of America), 3. onsemi US (United States of America))