Presentation Information

[A-2-05]TiN Thickness Scaling as a Lever for Interlayer Scavenging: Gate Stack Performance and Reliability Perspectives

〇Elhadji Alhousseyni Diallo1, Tadeu Mota Frutuoso1, William Vandendaele1, Rèmy Gassilloud1, Elise Arnoux1, Laurent Brevard1, Claire Fenouillet-Beranger1, Marie-claire Cyrille1, Xavier Garros (1. Univ. Grenoble Alpes, CEA-Leti (France))