Presentation Information
[A-3-01]Quantitative Evaluation of the Effect of Spike RTA and Cyclic DHF/O3 Cleaning on Ge Residue and Device Properties for GAAFET Performance Enhancement
〇Ryutaro Nishino1, Chia-Tsong Chen1, Yukinori Morita1, Naoto Kumagai1, Hiroyuki Ota1, Kazuya Uejima1, Atsushi Yagishita1, Toshifumi Irisawa1, Yoshihiro Hayashi1 (1. ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY (Japan))