[A-3] Gate stack engineering 2

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[A-3-03] Dual WFM Patterning in mCFET RMG: Understanding Patterning Limitations and Enabling Scalable Solutions

〇Camila Toledo de Carvalho Cavalcante¹, Hiroaki Arimura¹, Pallavi Puttarame Gowda¹, Kenneth Lai¹, Efrain Altamirano Sanchez¹, Dmitry Batuk¹, Thomas Chiarella¹, Jerome Mitard¹, Violeta Georgieva¹, Harinarayanan Puliyalil¹, Sujith Subramanian¹, Lucas Petersen Barbosa Lima¹, Steven Demuynck¹, Naoto Horiguchi¹, Serge Biesemans¹ (1. imec (Belgium))