Presentation Information
[A-4-05]Monolithic 3D All-WSe2 CFET Inverter Enabled by Localized Electron-Beam Band Engineering and 2D-Compatible Process Engineering
〇Chi-Chun Cheng1, Chun-Yen Hsiao1, Long-An Lee1, Nguyen Huynh-Uyen-Phuong1, Po-Wen Chiu1 (1. National Tsing Hua University (Taiwan))
