[A-5] GAA FET

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[A-5-03] Insights into Ultra-Scaled Nanosheet FETs for the Angstrom Era

〇Anabela Veloso¹, Ruben Asanovski¹, Jeroen E. Scheerder¹, Daniel Casey², Conor Cullen², Clement Porret¹, Thomas Dursap¹, Geert Eneman¹, Felix Seidel¹, Claudia Fleischmann¹, Paola Favia¹, Ritam Sarkar¹, Arka Dutta¹, Xiuju Zhou¹, Anne Vandooren¹, Roger Loo¹, Rami Khazaka², Naoto Horiguchi¹ (1. imec (Belgium), 2. ASM (Belgium))