[A-6] Advanced CMOS process

10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)

[A-6-02] Overlay and Grid Distortion Control in the Fabrication of Bonded CFET devices

〇Rajendra Kumar Saroj¹, Andrea Mingardi¹, Teresa Rodrigues¹, Koen D'have¹, Sandip Halder¹, Hans Mertens¹, Camila Cavalcante¹, Hung-Chieh Tsai¹, Serena Iacovo¹, Steven Brems¹, Min-Soo Kim¹, Steven Demuynck¹, Lucas Petersen Barbosa Lima¹, Naoto Horiguchi¹, Serge Biesemans¹ (1. IMEC (Belgium))