Presentation Information

[A-7-02]Improvement of Endurance Properties in Ferroelectric HfxZr1−xO2 Thin Films by Designing Interfaces Using Oxygen Blocking Layers

〇Takashi Onaya1, Toshihide Nabatame1, Takahiro Nagata1, Kazuhito Tsukagoshi1 (1. NIMS (Japan))