[A-7] Process for memory

1:15 PM - 1:30 PM JST(4:15 AM - 4:30 AM UTC)

[A-7-03] Hydrogen-Induced Boron Deactivation and Reactivation via Interstitial-Complex Dissociation in CMOS

〇Pooi Lee Tung^1,2, Sanchali Mitra³, Yee Sin Ang³, Yan Song², Kah Wee Ang¹ (1. National University of Singapore (NUS) (Singapore), 2. Micron Semiconductor Asia Pte. Ltd (Singapore), 3. Singapore University of Technology and Design (SUTD) (Singapore))