Presentation Information
[A-8-05]Impact of substrate off-angles on electrical characteristics of vicinal Si(110) n-MOSFETs
〇Ryotaro Shimura1, Yutong Chen1, Koji Matsumoto2, Akihiro Suzuki2, Hiroaki Yamamoto2, Kazuhito Matsukawa2, Mitsuru Takenaka1, Shinichi Takagi1,3, Kasidit Toprasertpong1 (1. The Univ. of Tokyo (Japan), 2. SUMCO Corp. (Japan), 3. Teikyo Univ. (Japan))
